Bipolar tuning of silica-on-silicon directional couplers by electron beam irradiation

Author

Syms, R.R.A. ; Lewandowski, J. ; Nield, M. ; MacKenzie, F.

Author_Institution

Dept. of Electr. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK

Volume

6

Issue

4

fYear

1994

fDate

4/1/1994 12:00:00 AM

Firstpage

525

Lastpage

527

Abstract

It is demonstrated that the coupling strength of buried channel waveguide silica-on-silicon directional couplers may be tuned by flood irradiation with an electron beam. Experimental data are presented for devices with arsenosilicate glass cores and pure silica cladding. It is shown that the change in coupling strength may be positive or negative as desired, depending on the energy of the electron beam, due to differences in irradiation sensitivity between the core and cladding materials.<>

Keywords

directional couplers; electron beam effects; integrated optics; optical couplers; sensitivity; tuning; As/sub 2/O/sub 5/-SiO/sub 2/; Si; Si-SiO/sub 2/; arsenosilicate glass cores; bipolar tuning; buried channel waveguide; coupling strength; electron beam irradiation; flood irradiation; irradiation sensitivity; pure silica cladding; silica-on-silicon directional couplers; Directional couplers; Electron beams; Glass; Inductors; Laser tuning; Optical coupling; Optical devices; Optical waveguides; Silicon compounds; Voltage;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.281815

Filename

281815