DocumentCode
1078424
Title
Direct laser generation of large field high resolution thin metal film patterns
Author
Townsend, W. ; Zaleckas, V. ; Muniz, Joao
Author_Institution
Western Electric Company, Princeton, NJ
Volume
15
Issue
9
fYear
1979
fDate
9/1/1979 12:00:00 AM
Firstpage
993
Lastpage
994
Keywords
Laser applications, materials processing; Thin-film devices; Dielectric materials; Explosives; Laser beams; Machining; Optical feedback; Optical films; Optical materials; Power lasers; Substrates; Transistors;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1979.1070204
Filename
1070204
Link To Document