Title :
Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers
Author :
Meng-Hsiung Kiang ; Solgaard, O. ; Muller, R.S. ; Lau, K.Y.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
We present an actuated silicon-micromachined micromirror with continuous and highly accurate position adjustment designed to be used in the construction of external-cavity semiconductor-laser modules. In our initial design, a positioning accuracy better than /spl plusmn/0.2 μm for the actuated micromirrors is obtained. The mechanical robustness, small size, and fine-positional precision of the actuated micromirrors are sufficient for external-cavity-laser applications. In production, the cost of these miniature external-cavity-laser systems should be low because they are batch-processed.
Keywords :
elemental semiconductors; laser cavity resonators; laser mirrors; microactuators; micromachining; micromechanical resonators; modules; semiconductor device packaging; semiconductor lasers; silicon; Si-micromachined micromirrors; actuated micromirrors; batch-processed; continuous highly accurate position adjustment; cost; design; external-cavity semiconductor lasers; fine-positional precision; integrated high-precision actuators; mechanical robustness; positioning accuracy; semiconductor-laser modules; small size; Actuators; Electrostatics; Fiber lasers; Laser mode locking; Laser tuning; Lenses; Micromirrors; Semiconductor lasers; Silicon; Substrates;
Journal_Title :
Photonics Technology Letters, IEEE
