DocumentCode
1079161
Title
Tunable three-dimensional solid Fabry-Perot etalons fabricated by surface-micromachining
Author
Lin, Lih Y. ; Shen, J.L. ; Lee, S.S. ; Wu, M.C. ; Sergent, A.M.
Author_Institution
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Volume
8
Issue
1
fYear
1996
Firstpage
101
Lastpage
103
Abstract
We report on novel tunable three-dimensional solid Fabry-Perot etalons fabricated by the surface-micromachining technique. The Fabry-Perot etalon is monolithically integrated with an on-chip rotation stage for angle tuning. A wavelength tuning range of 45 nm has been achieved at 1.3 μm wavelength for a rotation angle of 70/spl deg/. The optical properties of the polysilicon materials have also been characterized using the etalon as testing vehicles.
Keywords
Fabry-Perot interferometers; integrated optics; micromachining; optical fabrication; optical testing; tuning; 1.3 mum; Fabry-Perot etalon; Si; angle tuning; fabrication; on-chip rotation stage; optical properties; polysilicon materials; solid Fabry-Perot etalons; surface-micromachining; testing vehicles; wavelength tuning range; Bandwidth; Fabry-Perot; Mirrors; Optical fiber filters; Optical filters; Optical surface waves; Optical tuning; Solids; Vehicles; Wavelength division multiplexing;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/68.475792
Filename
475792
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