• DocumentCode
    1079585
  • Title

    Laser chemical vapor deposition of metals and insulators

  • Author

    Allen, S.

  • Author_Institution
    University of Southern California, Los Angeles, CA
  • Volume
    15
  • Issue
    9
  • fYear
    1979
  • fDate
    9/1/1979 12:00:00 AM
  • Firstpage
    988
  • Lastpage
    989
  • Keywords
    Insulators; Laser chemistry applications; Metals; Chemical lasers; Chemical vapor deposition; Insulation; Laser noise; Metal-insulator structures; Optical films; Pulsed laser deposition; Semiconductor films; Semiconductor lasers; Substrates;
  • fLanguage
    English
  • Journal_Title
    Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9197
  • Type

    jour

  • DOI
    10.1109/JQE.1979.1070307
  • Filename
    1070307