DocumentCode
1079585
Title
Laser chemical vapor deposition of metals and insulators
Author
Allen, S.
Author_Institution
University of Southern California, Los Angeles, CA
Volume
15
Issue
9
fYear
1979
fDate
9/1/1979 12:00:00 AM
Firstpage
988
Lastpage
989
Keywords
Insulators; Laser chemistry applications; Metals; Chemical lasers; Chemical vapor deposition; Insulation; Laser noise; Metal-insulator structures; Optical films; Pulsed laser deposition; Semiconductor films; Semiconductor lasers; Substrates;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1979.1070307
Filename
1070307
Link To Document