• DocumentCode
    1080126
  • Title

    Dislocation density and sheet resistance variations across semi-insulating GaAs wafers

  • Author

    Blunt, Roy T. ; Clark, Stephen ; Stirland, D.J. ; Stirland, Derek J.

  • Author_Institution
    Plessey Research Limited, Caswell, England
  • Volume
    29
  • Issue
    7
  • fYear
    1982
  • fDate
    7/1/1982 12:00:00 AM
  • Firstpage
    1039
  • Lastpage
    1045
  • Abstract
    Dislocation densities and sheet resistances have been measured across
  • Keywords
    Conductivity; Density measurement; Electrical resistance measurement; Electron traps; Epitaxial growth; Etching; Gallium arsenide; Ion implantation; Manufacturing; Substrates;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1982.20831
  • Filename
    1482328
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1080126