DocumentCode
1081116
Title
Scanning laser microscope
Author
Bogdankevich, O.V. ; Djukov, V.G. ; Beljaev, S.A. ; Gavrikov, S.I. ; Nevzorova, L.N.
Author_Institution
All Union Research Institute of Metrology Service, Moscow, USSR
Volume
16
Issue
2
fYear
1980
fDate
2/1/1980 12:00:00 AM
Firstpage
129
Lastpage
131
Abstract
An electronically scanning electron beam excited semiconductor laser device with end pumped geometry is described. The device is based on the "Camebax" type scanning electron microscope and obtains different images in reflected, transmitted, or scattered light with spatial resolution of 1 μ. The induced current mode is also possible. The device has a wide selection of scanning speeds, including standard TV scanning. The continuously variable mangification with ten-to-one zoom control can be carried out electronically without change of optical objective. The influence of crystal inhomogeneities picture definition is shown.
Keywords
Laser applications; Microscopy; Semiconductor lasers; Electron beams; Geometrical optics; Laser excitation; Laser modes; Light scattering; Optical scattering; Pump lasers; Scanning electron microscopy; Semiconductor lasers; Spatial resolution;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1980.1070443
Filename
1070443
Link To Document