DocumentCode
1081278
Title
I-4 submicron VLSI
Author
Buss, D.
Volume
29
Issue
10
fYear
1982
fDate
10/1/1982 12:00:00 AM
Firstpage
1660
Lastpage
1660
Keywords
Geometry; Instruments; Laboratories; MOS devices; MOSFET circuits; Paper technology; Silicon; Technology forecasting; Threshold voltage; Very large scale integration;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1982.20938
Filename
1482435
Link To Document