Title :
Plans for Next-Gen Chips Imperiled
Abstract :
In chip industry, a technique called extreme ultraviolet (EUV) photolithography would be ready to start churning out cutting-edge logic chips. Today´s technology uses light with a wavelength of 193 nanometers to produce chips with key parts, or features, that measure just 65 nm.
Keywords :
integrated circuit technology; integrated logic circuits; nanolithography; photoresists; ultraviolet lithography; EUV technique; chip industry; extreme ultraviolet photolithography; logic chips; photoresist; size 65 nm; wavelength 193 nm; Circuits; Etching; Length measurement; Lithography; Logic; Microprocessors; Photonics Society; Resists; Roads; Ultraviolet sources;
Journal_Title :
Spectrum, IEEE
DOI :
10.1109/MSPEC.2007.4283527
