IIIB-1 two-dimensional modeling of local oxidation

Author

Chin, D. ; Dutton, R.W. ; Hu, S.M. ; Oh, S.Y. ; Moll, J.L.

Author_Institution

Stanford University, CA

Volume

Issue

fYear

1982

fDate

10/1/1982 12:00:00 AM

Firstpage

1677

Lastpage

1677

Keywords

Acceleration; Boundary conditions; Boundary value problems; Integral equations; Oxidation; Shape; Silicon; Stress; Temperature; Viscosity;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

DOI

10.1109/T-ED.1982.20962

Filename

1482459

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