DocumentCode :
1081989
Title :
Polyurethane rubber all-polymer artificial hair cell sensor
Author :
Engel, Jonathan M. ; Chen, Jack ; Liu, Chang ; Bullen, David
Author_Institution :
Dept. of Mech. & Ind. Eng., Illinois Univ., Urbana, IL
Volume :
15
Issue :
4
fYear :
2006
Firstpage :
729
Lastpage :
736
Abstract :
In this paper, we present the design, fabrication process, and preliminary testing results of an artificial hair cell (AHC) sensor made entirely of polymer materials from the substrate level up. The new AHC sensor utilizes polyurethane elastomers for sensing and structures. The AHC can detect two-axis deflection of a vertical polyurethane hair using carbon-impregnated polyurethane force sensitive resistors (FSRs). AHC with cylindrical hair cross-section exhibit sensitivity of 245 ppm resistance change for every micron (ppm/mum) of tip deflection. The AHC threshold detection level of 3 mum compares favorably with insect tactile hair cells having thresholds on the order of 30-50 mum. Furthermore, we have characterized the mechanical and chemical properties of two-part room-temperature-curing polyurethane elastomers in the context of microfabrication. Elastic properties, chemical resistance, thermal oxidative decomposition, and adhesion properties are tested and compared to the performance of polydimethylsiloxane (PDMS), a widely used elastomeric material. Polyurethane elastomer exhibit superior mechanical tear resistance and ability to adhere to substrates compared to PDMS
Keywords :
elastomers; micromachining; microsensors; polymers; tactile sensors; adhesion properties; artificial hair cell sensor; biomimetic; chemical properties; chemical resistance; curing; elastic properties; elastomeric material; elastomers; force sensitive resistors; insect tactile hair cells; mechanical tear resistance; microfabrication; polydimethylsiloxane; polymer materials; polyurethane rubber; thermal oxidative decomposition; Chemicals; Fabrication; Force sensors; Hair; Materials testing; Polymers; Process design; Resistors; Rubber; Thermal resistance; Artificial hair cell (AHC); biomimetic; force sensitive resistor (FSR); polymer;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2006.879373
Filename :
1668167
Link To Document :
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