DocumentCode
1081992
Title
Punch-through type InGaAs photodetector fabricated by vapor-phase epitaxy
Author
Susa, Nobuhiko ; Yamauchi, Yoshiharu ; Kanbe, Hiroshi ; Susa, N. ; Yamauchi, Yuji ; Kanbe, H.
Author_Institution
Nippon Telegraph and Telephone Public Corporation, Tokyo, Japan
Volume
16
Issue
5
fYear
1980
fDate
5/1/1980 12:00:00 AM
Firstpage
542
Lastpage
545
Abstract
Punch-through type InGaAs/InP photodiodes were made from high purity layers grown on
Keywords
Punchthrough diodes; Dark current; Diodes; Epitaxial growth; Etching; Indium gallium arsenide; Indium phosphide; Low voltage; Photodetectors; Photodiodes; Substrates;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1980.1070525
Filename
1070525
Link To Document