DocumentCode
1082778
Title
GaAs/AlGaAs heterojunction bipolar transistors for integrated circuit applications
Author
McLevige, W.V. ; Yuan, H.T. ; Duncan, W.M. ; Frensley, W.R. ; Doerbeck, F.H. ; Morkoc, H. ; Drummond, T.J.
Author_Institution
Texas Instruments Incorporated, Dallas, TX
Volume
3
Issue
2
fYear
1982
fDate
2/1/1982 12:00:00 AM
Firstpage
43
Lastpage
45
Abstract
Molecular-beam epitaxy (MBE) and ion implantation were used to fabricate GaAs/AlGaAs heterojunction bipolar transistors with buried wide bandgap emitters. Inverted-mode current gains of ∼ 100 were obtained, demonstrating the feasibility of this technology for I2L types of digital integrated circuits.
Keywords
Annealing; Application specific integrated circuits; Bipolar integrated circuits; Digital integrated circuits; Epitaxial growth; Gallium arsenide; Heterojunction bipolar transistors; Implants; Microwave transistors; Molecular beam epitaxial growth;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1982.25471
Filename
1482576
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