• DocumentCode
    1084109
  • Title

    Dual-gate a—Si:H thin film transistors

  • Author

    Tuan, H.C. ; Thompson, M.J. ; Johnson, N.M. ; Lujan, R.A.

  • Author_Institution
    Xerox Palo Alto Research Center, Palo Alto, CA
  • Volume
    3
  • Issue
    12
  • fYear
    1982
  • fDate
    12/1/1982 12:00:00 AM
  • Firstpage
    357
  • Lastpage
    359
  • Abstract
    Dual-gate accumulation mode thin film transistors have been fabricated for the first time in a-Si:H on bulk glass substrates. The devices display exceptionally high performance, as compared to previously reported single-gate a-Si:H transistors. For a channel length of 10 µm and width of 168 µm, drain currents in the range of 5-10 µA were obtained for gate biases of 15 V in both of the two conducting channels induced in the a-Si:H layer. The drain current of the TFT operating in the dual-gate mode was found to be larger than the arithmetic sum of the drain currents through the two individual channels obtained from single-mode operation. A significant difference in dc stability between the two channels was observed. The use of the dual-gate TFT as a diagnostic structure for studying interface properties and contact effects has been demonstrated.
  • Keywords
    Dielectrics; Electrodes; Fabrication; Glass; Laboratories; Plasma sources; Silicon; Stability; Substrates; Thin film transistors;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1982.25599
  • Filename
    1482704