Title :
Laser stripe cutting system for IC debugging
Author :
Yamaguchi, Hitoshi ; Hongo, Minoru ; Miyauchi, T. ; Mitani, M. ; Ito, Kei ; Torisawa, S.
Author_Institution :
Hitachi Ltd., Yoshida-Cho, Totsuka-Ku, Yokohama, Japan
fDate :
12/1/1981 12:00:00 AM
Keywords :
Conductors; Debugging; Dielectrics; Drilling; Glass; Laser beam cutting; Lenses; Power lasers; Printed circuits; Pulsed laser deposition;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1981.1070741
