DocumentCode

1084277

Title

Laser stripe cutting system for IC debugging

Author

Yamaguchi, Hitoshi ; Hongo, Minoru ; Miyauchi, T. ; Mitani, M. ; Ito, Kei ; Torisawa, S.

Author_Institution

Hitachi Ltd., Yoshida-Cho, Totsuka-Ku, Yokohama, Japan

Volume

17

Issue

12

fYear

1981

fDate

12/1/1981 12:00:00 AM

Firstpage

2514

Lastpage

2515

Keywords

Conductors; Debugging; Dielectrics; Drilling; Glass; Laser beam cutting; Lenses; Power lasers; Printed circuits; Pulsed laser deposition;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1981.1070741

Filename

1070741