DocumentCode

1084484

Title

Semiconductor device applications of laser processing

Author

Crosthwait, D.

Author_Institution

Texas Instruments, Inc., Dallas, TX, USA

Volume

17

Issue

12

fYear

1981

fDate

12/1/1981 12:00:00 AM

Firstpage

2490

Lastpage

2491

Keywords

Annealing; Detectors; Instruments; Laser applications; Optical device fabrication; Optical materials; Semiconductor devices; Semiconductor lasers; Sensor arrays; Silicon;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1981.1070761

Filename

1070761