• DocumentCode
    1084932
  • Title

    A Novel Test Strategy for Fine Pitch Wafer-Level Packaged Devices

  • Author

    Jayabalan, Jayasanker ; Rotaru, Mihai Dragos ; Rao, Vempati Srinivasa ; Kripesh, Vaidyanathan ; Iyer, Mahadevan Krishna ; Tay, Andrew A O ; Ooi, Ban-Leong ; Leong, Mook-Seng

  • Author_Institution
    Inst. of Microelectron., Singapore
  • Volume
    30
  • Issue
    3
  • fYear
    2007
  • Firstpage
    439
  • Lastpage
    447
  • Abstract
    This paper describes an innovative test strategy comprising a compliant elastomer mesh for testing fine pitch wafer-level package (WLP) devices. The test probe, hardware, and sample preparation processes are detailed. The components of the test hardware socket such as the SMA connectors, coplanar transmission lines on the PCB, via, off-chip interconnect, and elastomer mesh probe have been modeled. A complete system-level model, with off-chip interconnects on the WLP device pads, has been developed. The measurement and model demonstrate that the prototype test socket performs at 5 GHz with an insertion loss of about 3 dB. WLP device with Bed-of-Nail interconnects are characterized. Functional test features of the system are also addressed.
  • Keywords
    elastomers; fine-pitch technology; integrated circuit interconnections; integrated circuit testing; wafer level packaging; bed-of-nail interconnects; elastomer mesh probe; fine pitch technology; frequency 5 GHz; loss 3 dB; test hardware socket; test probe; wafer-level packaging; Connectors; Coplanar transmission lines; Hardware; Packaging; Probes; Semiconductor device modeling; Sockets; Testing; Transmission line measurements; Wafer scale integration; Coplanar probe; elastomer mesh substrate; multigigahertz test; wafer-level package test and characterization;
  • fLanguage
    English
  • Journal_Title
    Advanced Packaging, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1521-3323
  • Type

    jour

  • DOI
    10.1109/TADVP.2007.898617
  • Filename
    4285934