• DocumentCode
    1085262
  • Title

    Empirical relation of margin to gap and linewidth in AC plasma panel

  • Author

    Hairabedian, Barry

  • Author_Institution
    IBM Corporation, Kingston, NY
  • Volume
    30
  • Issue
    5
  • fYear
    1983
  • fDate
    5/1/1983 12:00:00 AM
  • Firstpage
    444
  • Lastpage
    447
  • Abstract
    The method and results of second order multivariable regression analysis on a large sample of panels are presented. Plots relate margin to gap, linewidth, and manufacturing tolerances within a panel.
  • Keywords
    Argon; Conductors; Dielectric measurements; Plasmas; Pollution measurement; Regression analysis; Surface contamination; Testing; Voltage; Writing;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1983.21144
  • Filename
    1483045
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1085262