Title :
SEM-EBIC and traveling light spot diffusion length measurements: Normally irradiated charge-collecting diode
Author :
Ioannou, Dimitris E. ; Gledhill, Richard J.
Author_Institution :
Middlesex Polytechnic, London, England
fDate :
6/1/1983 12:00:00 AM
Abstract :
An analysis of the induced current in a normally irradiated diode by monochromatic light or a SEM electron beam is given, which can be used to determine the diffusion length. Two light sources are considered: a traveling light spot and uniform illumination with part of the sample containing the diode shadowed by a knife-edge mask. The diffusion length is determined by readily computed numerical calculations.
Keywords :
Artificial intelligence; Current measurement; Electron beams; Equations; Length measurement; Light sources; Lighting; Numerical analysis; Scanning electron microscopy; Semiconductor diodes;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1983.21171
