Birefringence control of silica waveguides on Si and its application to a polarization-beam splitter/switch

Author

Okuno, Masayuki ; Sugita, Akio ; Jinguji, Kaname ; Kawachi, Masao

Author_Institution

NTT Opto-Electron. Labs., Ibaraki, Japan

Volume

12

Issue

4

fYear

1994

fDate

4/1/1994 12:00:00 AM

Firstpage

625

Lastpage

633

Abstract

A novel polarization-beam splitter/switch with a Mach-Zehnder interferometer configuration was fabricated using a silica-based planar lightwave circuit (PLC) on a silicon substrate. The polarization-beam splitter/switch was realized by accurately controlling the waveguide birefringence and the phase state by laser trimming two kinds of stress-applying amorphous silicon film with widths of 50 μm and 95 μm. Fiber-waveguide-fiber insertion loss of 0.5 dB and crosstalk attenuations of over 25.6 dB were attained

Keywords

birefringence; crosstalk; elemental semiconductors; integrated optics; laser beam machining; light interferometers; light polarisation; optical losses; optical waveguides; silicon; silicon compounds; 0.5 dB; 25.6 dB; Mach-Zehnder interferometer configuration; Si; Si substrate; SiO₂; SiO₂ waveguides; SiO₂-based planar lightwave circuit; birefringence control; crosstalk attenuations; fiber-waveguide-fiber insertion loss; laser trimming; phase state; polarization-beam splitter/switch; stress-applying amorphous Si film; waveguide birefringence; widths; Birefringence; Fiber lasers; Optical control; Optical polarization; Programmable control; Silicon compounds; Stress control; Substrates; Switches; Switching circuits;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.285356

Filename

285356