Calibration of Multi-Axis MEMS Force Sensors Using the Shape-From-Motion Method

Author

Kim, Keekyoung ; Sun, Yu ; Voyles, Richard M. ; Nelson, Bradley J.

Author_Institution

Mech. & Ind. Eng. Dept., Univ. of Toronto, Ont.

Volume

7

Issue

3

fYear

2007

fDate

3/1/2007 12:00:00 AM

Firstpage

344

Lastpage

351

Abstract

Precise calibration of multi-axis microelectromechanical systems (MEMS) force sensors is difficult for several reasons, including the need to apply many known force vectors at precise orientations at the micro- and nanoNewton (nN) force scales, and the risk of damaging the small, fragile microdevices. To tackle these challenges, this paper introduces the shape-from-motion calibration method. A new design of a two-axis MEMS capacitive force sensor with high linearity and nN resolutions is presented. Structural-electrostatic coupled-field simulations are conducted in order to optimize the sensor design. The designed sensor is calibrated with the shape-from-motion method, the least-squares method as well as the gravity-based method for comparison purposes. Calibration results demonstrate that the shape-from-motion method provides a rapid, practical, and accurate technique for calibrating multi-axis MEMS sensors

Keywords

calibration; capacitive sensors; force sensors; least squares approximations; microsensors; capacitive force sensor; least-squares method; microelectromechanical systems; multiaxis MEMS; precise calibration; shape-from-motion; Atomic force microscopy; Atomic measurements; Calibration; Force measurement; Force sensors; Microelectromechanical systems; Micromechanical devices; Nanobioscience; Pressure measurement; Sun; Calibration; microelectromechanical systems (MEMS) force sensor; multi-axis; shape-from-motion;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2006.890141

Filename

4084523