Title :
Equivalent networks for SAW interdigital transducers
Author :
Inagawa, Kiyoshi ; Koshiba, Masanori
Author_Institution :
Dept. of Electr. Eng., Tomakomai Nat. Coll. of Technol., Japan
fDate :
5/1/1994 12:00:00 AM
Abstract :
An equivalent network approach is described for the analysis of surface-acoustic-wave interdigital transducers. Circuit parameters can he theoretically determined by applying the finite-element method to an infinite array. In this approach, all the effects of piezoelectric perturbation, mechanical perturbation, and energy storage are taken into account, To show the validity and usefulness of this approach, examples are computed for both single- and double-electrode interdigital transducers and one-port resonators. For single- and double-electrode interdigital transducers on 128/spl deg/Y-X LiNbO/sub 3/, X-112/spl deg/Y LiTaO/sub 3/,/sub 45//spl deg/X-Z Li/sub 2/B/sub 4/O/sub 7/, and ST-X quartz substrates, the dependence of excitation characteristics on electrode thickness and metallization ratio is investigated in detail. For a 128/spl deg/Y-XLiNbO/sub 3/ substrate, frequency responses of various one-port resonators are also investigated.<>
Keywords :
acoustic arrays; acoustic resonators; equivalent circuits; finite element analysis; frequency response; piezoelectric transducers; surface acoustic wave devices; ultrasonic transducers; Li/sub 2/B/sub 4/O/sub 7/; LiNbO/sub 3/; LiTaO/sub 3/; SAW interdigital transducers; ST-X quartz substrates; SiO/sub 2/; circuit parameters; double-electrode interdigital transducers; electrode thickness; energy storage; equivalent network approach; excitation characteristics; finite-element method; frequency response; infinite array; mechanical perturbation; metallization ratio; one-port resonators; piezoelectric perturbation; single-electrode interdigital transducers; surface-acoustic-wave interdigital transducers; Capacitance; Electrodes; Energy storage; Equivalent circuits; Finite element methods; Frequency; Metallization; Piezoelectric transducers; Surface acoustic waves;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
