DocumentCode

1086319

Title

Tunable ultrahigh spectral brightness ArF* excimer laser source

Author

Egger, Herbert ; Srinivasan, T. ; Hohla, K. ; Scheingraber, H. ; Vidal, Carlos ; Plummer, H.

Author_Institution

University of Illinois, Chicago, IL, USA

Volume

17

Issue

12

fYear

1981

fDate

12/1/1981 12:00:00 AM

Firstpage

2466

Lastpage

2466

Keywords

Brightness; Costs; Laboratories; Laser excitation; Optical pulses; Pulse amplifiers; Pulse compression methods; Pump lasers; Tunable circuits and devices; Xenon;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1981.1070930

Filename

1070930