Increased avalanche breakdown voltage and controlled surface electric fields using a junction termination extension (JTE) technique

Extremely high breakdown voltages with very low leakage current have been achieved in plane and planar p-n junctions by using an ion-implemented junction extension for precise control of the depletion region charge in the junction termination. A theory is presented which shows a greatly improved control of both the peak surface and bulk electric fields in reverse biased p-n junctions. Experimental results show breakdown voltages greater than 95 percent of the ideal breakdown voltage with lower leakage currents than corresponding unimplanted devices. As an example, diodes with a normal breakdown voltage of 1050 V and a 0.5 mA leakage current become 1400 V (1450 ideal) devices with a 5 µA leakage current. Applications of the junction termination technique is feasible in MOS technology, but is more attractive in power devices where reduced surface fields are as important as the extremely high breakdown voltages. Reduced surface fields allow more flexibility in passivation techniques, two of which we have used to date. Our results also show that the implant can be activated at a variety of temperatures with a good degree of success; process flexibility being the goal of these tests.