DocumentCode
1086339
Title
Laser photochemistry at surfaces for applications in microelectronics
Author
Ehrlich, D. ; Osgood, R. ; Deutsch, T.
Author_Institution
Massachusetts Institute of Technology, Lexington, MA, USA
Volume
17
Issue
12
fYear
1981
fDate
12/1/1981 12:00:00 AM
Firstpage
2464
Lastpage
2464
Keywords
Chemical lasers; Gas lasers; Laboratories; Microelectronics; Microstructure; Optical films; Optical surface waves; Photochemistry; Semiconductor lasers; Surface emitting lasers;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1981.1070932
Filename
1070932
Link To Document