Title :
Laser photochemistry at surfaces for applications in microelectronics
Author :
Ehrlich, D. ; Osgood, R. ; Deutsch, T.
Author_Institution :
Massachusetts Institute of Technology, Lexington, MA, USA
fDate :
12/1/1981 12:00:00 AM
Keywords :
Chemical lasers; Gas lasers; Laboratories; Microelectronics; Microstructure; Optical films; Optical surface waves; Photochemistry; Semiconductor lasers; Surface emitting lasers;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1981.1070932
