DocumentCode
1086349
Title
Pulsed UV laser photochemical doping of semiconductors
Author
Deutsch, T. ; Ehrlich, D. ; Turner, Greg ; Fan, Jintao ; Osgood, R.
Author_Institution
MIT, Lincoln Laboratory, Lexington, MA
Volume
17
Issue
12
fYear
1981
fDate
12/1/1981 12:00:00 AM
Firstpage
2464
Lastpage
2464
Keywords
Compressors; Electrons; Gas lasers; Laboratories; Laser fusion; Optical pulses; Photochemistry; Pulse compression methods; Semiconductor device doping; Semiconductor lasers;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1981.1070933
Filename
1070933
Link To Document