DocumentCode

1086559

Title

Applications of laser annealing in silicon device fibrication

Author

Hess, Laura ; Kokorowski, S. ; Olson, G.

Author_Institution

Hughes Research Labs., Malibu, CA, USA

Volume

17

Issue

12

fYear

1981

fDate

12/1/1981 12:00:00 AM

Firstpage

2492

Lastpage

2492

Keywords

Absorption; Annealing; Chemical lasers; Chemical technology; Laser applications; Laser excitation; Probes; Silicon devices; Solid lasers; Tunable circuits and devices;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1981.1070952

Filename

1070952