Title :
Applications of laser annealing in silicon device fibrication
Author :
Hess, Laura ; Kokorowski, S. ; Olson, G.
Author_Institution :
Hughes Research Labs., Malibu, CA, USA
fDate :
12/1/1981 12:00:00 AM
Keywords :
Absorption; Annealing; Chemical lasers; Chemical technology; Laser applications; Laser excitation; Probes; Silicon devices; Solid lasers; Tunable circuits and devices;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1981.1070952
