Title :
Directional Coupler Formed by Photonic Crystal InAlGaAs Nanorods
Author :
Chiu, W.Y. ; Huang, T.W. ; Wu, Y.H. ; Huang, F.H. ; Chen, S.H. ; Chan, Y.J. ; Hou, C.H. ; Chien, H.T. ; Chyi, J.I.
Author_Institution :
Nat. Central Univ., Jhongli
fDate :
3/1/2008 12:00:00 AM
Abstract :
In this paper, we demonstrate the use of photonic crystal (PC) directional couplers to separate light of wavelengths at 1.31 and 1.55 m. The PC structure consists of InAlGaAs nanorods arranged in hexagonal lattice. The simulation of our device is implemented by the finite-difference time-domain method. The devices are fabricated by e-beam lithography and conventional photolithography. We use the strong inverse method (SIM) of e-beam lithography to make the pattern smoother. The measurement results confirm that 1.31/1.55-m wavelength splitter can be realized in PC structures formed by nanorods.
Keywords :
III-V semiconductors; electron beam lithography; finite difference time-domain analysis; indium compounds; nanostructured materials; optical directional couplers; photolithography; photonic crystals; InAlGaAs; directional coupler; e-beam lithography; finite-difference time-domain method; hexagonal lattice; photolithography; photonic crystal InAlGaAs nanorods; strong inverse method; wavelength 1.31 mum; wavelength 1.55 mum; wavelength splitter; Dielectrics; Directional couplers; III-V semiconductor materials; Laboratories; Lithography; Nanostructures; Optical filters; Optical waveguides; Photonic crystals; Semiconductor waveguides; Coupler; photonic crystal (PC); splitter;
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.2007.916562
