Directional Coupler Formed by Photonic Crystal InAlGaAs Nanorods

Author

Chiu, W.Y. ; Huang, T.W. ; Wu, Y.H. ; Huang, F.H. ; Chen, S.H. ; Chan, Y.J. ; Hou, C.H. ; Chien, H.T. ; Chyi, J.I.

Author_Institution

Nat. Central Univ., Jhongli

Volume

26

Issue

5

fYear

2008

fDate

3/1/2008 12:00:00 AM

Firstpage

488

Lastpage

491

Abstract

In this paper, we demonstrate the use of photonic crystal (PC) directional couplers to separate light of wavelengths at 1.31 and 1.55 m. The PC structure consists of InAlGaAs nanorods arranged in hexagonal lattice. The simulation of our device is implemented by the finite-difference time-domain method. The devices are fabricated by e-beam lithography and conventional photolithography. We use the strong inverse method (SIM) of e-beam lithography to make the pattern smoother. The measurement results confirm that 1.31/1.55-m wavelength splitter can be realized in PC structures formed by nanorods.

Keywords

III-V semiconductors; electron beam lithography; finite difference time-domain analysis; indium compounds; nanostructured materials; optical directional couplers; photolithography; photonic crystals; InAlGaAs; directional coupler; e-beam lithography; finite-difference time-domain method; hexagonal lattice; photolithography; photonic crystal InAlGaAs nanorods; strong inverse method; wavelength 1.31 mum; wavelength 1.55 mum; wavelength splitter; Dielectrics; Directional couplers; III-V semiconductor materials; Laboratories; Lithography; Nanostructures; Optical filters; Optical waveguides; Photonic crystals; Semiconductor waveguides; Coupler; photonic crystal (PC); splitter;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2007.916562

Filename

4459743