DocumentCode

1086881

Title

Pulsed and cw laser annealing of polysilicon films

Author

Wilson, Stuart ; Paulson, W. ; White, Connor

Author_Institution

Motorola, Inc., Phoenix, AZ, USA

Volume

17

Issue

12

fYear

1981

fDate

12/1/1981 12:00:00 AM

Firstpage

2492

Lastpage

2492

Keywords

Absorption; Annealing; Chemical lasers; Dielectric substrates; Optical pulses; Power lasers; Pulsed laser deposition; Semiconductor films; Silicon; Thermal expansion;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1981.1070980

Filename

1070980