DocumentCode

1086934

Title

Laser processing of polyimide films

Author

Ray, Sambaran ; Perry, Philip ; Hodgson, Robert

Author_Institution

IBM General Tech., NY, USA

Volume

17

Issue

12

fYear

1981

fDate

12/1/1981 12:00:00 AM

Firstpage

2492

Lastpage

2492

Keywords

Absorption; Chemical lasers; Chemical technology; Circuit testing; Laser excitation; Optical materials; Polyimides; Silicon; Solid lasers; Tunable circuits and devices;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1981.1070985

Filename

1070985