Integrated optical ring resonator with micromechanical diaphragms for pressure sensing

Author

De Brabander, Gregory N. ; Boyd, Joseph T. ; Beheim, Glenn

Author_Institution

Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA

Volume

6

Issue

5

fYear

1994

fDate

5/1/1994 12:00:00 AM

Firstpage

671

Lastpage

673

Abstract

An optical pressure sensor has been fabricated which uses an integrated-optical ring resonator to measure the strain induced in a micromachined silicon diaphragm. A silicon substrate is etched from the side opposite the silicon oxynitride optical waveguides to produce a rectangular diaphragm whose long edge lies underneath a straight section in the ring. Pressure-induced changes in the resonant frequency of the ring are measured using a frequency swept laser diode. A linear response to pressure is observed for the TM mode with a sensitivity of 0.0094 rad/kPa. This pressure sensor is rugged, is amenable to batch fabrication, and it provides a link-insensitive readout.<>

Keywords

integrated optics; optical resonators; optical sensors; optical waveguides; pressure sensors; Si; Si substrate; SiON; TM mode; batch fabrication; etched; frequency swept laser diode; integrated optical ring resonator; linear response; link-insensitive readout; long edge; micromachined silicon diaphragm; micromechanical diaphragms; optical pressure sensor; pressure sensing; pressure-induced changes; rectangular diaphragm; resonant frequency; rugged; silicon oxynitride optical waveguides; straight section; strain measurement; Capacitive sensors; Etching; Integrated optics; Micromechanical devices; Optical ring resonators; Optical sensors; Optical waveguides; Pressure measurement; Silicon; Strain measurement;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.285575

Filename

285575