Title :
VA-8 germanium MISFETs exhibiting low interface state density using Ge3N4gate insulator
Author :
Rosenberg, James J.
Author_Institution :
Columbia University
fDate :
11/1/1983 12:00:00 AM
Keywords :
Analog circuits; Charge carrier processes; Dielectrics and electrical insulation; Electron mobility; FETs; Fabrication; Gallium arsenide; Germanium; Interface states; MISFETs;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1983.21396