Title :
VIB-4 submicrometer laser-direct-write processing
Author :
Ehrlich, D.J. ; Tsao, Jeffrey Y.
fDate :
11/1/1983 12:00:00 AM
Keywords :
Diode lasers; Etching; Heterojunctions; Laboratories; Optical device fabrication; Solid lasers; Solid state circuits; Spatial resolution; Substrates; Writing;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1983.21415
