DocumentCode
1088546
Title
The MISIM-FET in thin semiconductor layers: Depletion-approximation model of I-V characteristics
Author
Barth, Phillip W. ; Apte, Prakash R. ; Angell, James B.
Author_Institution
Stanford University, Stanford, CA
Volume
30
Issue
12
fYear
1983
fDate
12/1/1983 12:00:00 AM
Firstpage
1717
Lastpage
1726
Abstract
Current-voltage equations have been derived for metal-insulator-semiconductor-insulator-metal inversion-type field-effect transistors (MISIM-FET\´s) in thin layers of single-crystal silicon. These dc equations, based on the depletion approximation and the gradual channel approximation, describe the effects of the "back" MIS gate on the "front" MIS channel in the triode region of strong-inversion operation. When the thickness of the silicon is less than twice the depletion depth, the front and back channels can interact. The de effects are a variation in the channel current and drain saturation voltage of one channel with voltage applied to the opposite gate. These models account for front-back channel interactions apparent in the MISIM-FET tetrode structure which cannot be modeled by one-sided MOS theory. In addition, they offer speed and simplicity in calculation or simulation of device characteristics. Preliminary experimental support is provided.
Keywords
Current-voltage characteristics; Electron mobility; Etching; Fabrication; Permittivity; Predictive models; Sea surface; Semiconductor films; Silicon; Threshold voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1983.21436
Filename
1483337
Link To Document