• DocumentCode
    1088546
  • Title

    The MISIM-FET in thin semiconductor layers: Depletion-approximation model of I-V characteristics

  • Author

    Barth, Phillip W. ; Apte, Prakash R. ; Angell, James B.

  • Author_Institution
    Stanford University, Stanford, CA
  • Volume
    30
  • Issue
    12
  • fYear
    1983
  • fDate
    12/1/1983 12:00:00 AM
  • Firstpage
    1717
  • Lastpage
    1726
  • Abstract
    Current-voltage equations have been derived for metal-insulator-semiconductor-insulator-metal inversion-type field-effect transistors (MISIM-FET\´s) in thin layers of single-crystal silicon. These dc equations, based on the depletion approximation and the gradual channel approximation, describe the effects of the "back" MIS gate on the "front" MIS channel in the triode region of strong-inversion operation. When the thickness of the silicon is less than twice the depletion depth, the front and back channels can interact. The de effects are a variation in the channel current and drain saturation voltage of one channel with voltage applied to the opposite gate. These models account for front-back channel interactions apparent in the MISIM-FET tetrode structure which cannot be modeled by one-sided MOS theory. In addition, they offer speed and simplicity in calculation or simulation of device characteristics. Preliminary experimental support is provided.
  • Keywords
    Current-voltage characteristics; Electron mobility; Etching; Fabrication; Permittivity; Predictive models; Sea surface; Semiconductor films; Silicon; Threshold voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1983.21436
  • Filename
    1483337