Title :
New micromechanical display using thin metallic films
Author :
Cadman, M.A. ; Perret, A. ; Porret, F. ; Vuilleumier, R. ; Weiss, P.
Author_Institution :
Centre Electronique Horloger S.A., Neuchâtel, Switzerland
fDate :
1/1/1983 12:00:00 AM
Abstract :
A new mechanical display is described, working on a simple electrostatic principle and yielding good contrast ratio (20-25), low power consumption, and short response time (1 ms). The device, which relies on the torsion of thin Al straps and works at some tens of volts, is fabricated using standard IC technology.
Keywords :
Aluminum; Bonding; Displays; Electrostatics; Energy consumption; Micromechanical devices; Optical films; Parasitic capacitance; Substrates; Voltage;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1983.25624