• DocumentCode
    1088876
  • Title

    Geometry-Dependent Quality Factors in Ba0.5Sr0.5TiO3 Parallel-Plate Capacitors

  • Author

    Pervez, Nadia K. ; York, Robert A.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA
  • Volume
    55
  • Issue
    2
  • fYear
    2007
  • Firstpage
    410
  • Lastpage
    417
  • Abstract
    Quality factor variation with top electrode area in thin-film barium-strontium-titanate parallel-plate capacitors is discussed. At low frequencies, the geometry dependence is consistent with the presence of a parallel parasitic loss pathway enabled by conduction over the device mesa surface. At high frequencies, the variation in the quality factor with top electrode area is due to a geometry-independent series resistance
  • Keywords
    Q-factor; barium alloys; strontium alloys; thin film capacitors; titanium alloys; (BaSr)TiO3; geometry scaling; geometry-dependent quality factors; geometry-independent series resistance; parallel parasitic loss pathway; parallel-plate capacitors; top electrode area; Binary search trees; Capacitors; Electrodes; Equivalent circuits; Frequency; Geometry; Microwave devices; Probes; Q factor; Strontium; Geometry scaling; high- $k$; parallel-plate capacitor; quality factor;
  • fLanguage
    English
  • Journal_Title
    Microwave Theory and Techniques, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9480
  • Type

    jour

  • DOI
    10.1109/TMTT.2006.889347
  • Filename
    4084844
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1088876