Title :
Comparison of Techniques for Microwave Characterization of BST Thin Films
Author :
Suherman, Phe M. ; Jackson, Timothy J. ; Lancaster, Michael J.
Author_Institution :
Sch. of Electron., Electr., & Comput. Eng., Univ. of Birmingham
Abstract :
Various techniques involving coplanar waveguide transmission lines, coplanar resonators, and interdigital capacitors, have been employed to characterize the dielectric properties of Ba0.05Sr0.95TiO3 thin films at cryogenic conditions. The devices were patterned from a high-temperature superconductor deposited on top of a single Ba0.05Sr0.95 TiO3 thin film. The measurements from these various techniques show a good agreement
Keywords :
barium alloys; coplanar waveguide components; dielectric thin films; high-temperature superconductors; semiconductor thin films; strontium alloys; thin film devices; titanium alloys; BST thin films; Ba0.05Sr0.95TiO3; coplanar resonators; coplanar waveguide transmission lines; cryogenic conditions; dielectric properties; high-temperature superconductor; interdigital capacitors; microwave characterization; Binary search trees; Capacitors; Coplanar transmission lines; Coplanar waveguides; Dielectric thin films; Microwave theory and techniques; Strontium; Superconducting thin films; Superconducting transmission lines; Transistors; Barium–strontium–titanate (BST); coplanar resonator (CPR); coplanar waveguide (CPW); interdigital capacitor (IDC);
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2006.889350
