DocumentCode
1089185
Title
Hydrogen-sensitive silicon tunnel MIS switching diodes
Author
Kawamura, K. ; Yamamoto, T.
Author_Institution
Shizuoka University, Johoku, Hamamatsu, Japan
Volume
4
Issue
4
fYear
1983
fDate
4/1/1983 12:00:00 AM
Firstpage
88
Lastpage
89
Abstract
Palladium thin SiO2 -n-p+silicon switching diodes have been fabricated in which the turn-on voltage changes in proportion to the hydrogen concentration in the ambient gas. In the typical diode operated at 100°C, the switching voltage decreases from 5.1 to 3.6 V for 10 ppm hydrogen in air within 2 min and the off-state disappears for 100 ppm within 30 s. Hydrogen sensitivity is ascribed to the increase of a current gain in two transistor model of the device due to the change in palladium work-function.
Keywords
Hydrogen; Impedance; MOSFETs; Ohmic contacts; Palladium; Schottky diodes; Silicon; Switches; Switching circuits; Threshold voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1983.25658
Filename
1483402
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