DocumentCode
1089528
Title
High-quality 2.5 GHz ZnO-based FBAR devices for broadband WiMAX applications
Author
Mai, L. ; Pham, V.-S. ; Yoon, G.
Author_Institution
Inf. & Commun. Univ., Daejeon
Volume
44
Issue
5
fYear
2008
Firstpage
387
Lastpage
388
Abstract
The improvements of resonance characteristics of ZnO-based film bulk acoustic-wave resonator (FBAR) devices operating at 2.5 GHz are presented for the first time. Because of thermal annealing processes, the resonance characteristics could be significantly improved. At about 2.5 GHz, excellent resonance characteristics are observed in terms of good return loss and high quality factor.
Keywords
WiMax; annealing; bulk acoustic wave devices; resonators; ZnO-based film bulk acoustic-wave resonator; broadband WiMAX applications; frequency 2.5 GHz; high-quality ZnO-based FBAR devices; resonance characteristics; thermal annealing process;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20080218
Filename
4460789
Link To Document