Title :
High-quality 2.5 GHz ZnO-based FBAR devices for broadband WiMAX applications
Author :
Mai, L. ; Pham, V.-S. ; Yoon, G.
Author_Institution :
Inf. & Commun. Univ., Daejeon
Abstract :
The improvements of resonance characteristics of ZnO-based film bulk acoustic-wave resonator (FBAR) devices operating at 2.5 GHz are presented for the first time. Because of thermal annealing processes, the resonance characteristics could be significantly improved. At about 2.5 GHz, excellent resonance characteristics are observed in terms of good return loss and high quality factor.
Keywords :
WiMax; annealing; bulk acoustic wave devices; resonators; ZnO-based film bulk acoustic-wave resonator; broadband WiMAX applications; frequency 2.5 GHz; high-quality ZnO-based FBAR devices; resonance characteristics; thermal annealing process;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20080218
