DocumentCode
1089928
Title
Improvement of photoluminescence of molecular beam epitaxially grown Gax Aly In1-x-y As by using an As2 molecular beam
Author
Tsang, W.T. ; Ditzenberger, J.A. ; Olsson, N.A.
Author_Institution
Bell Laboratories, Murray Hill, NJ
Volume
4
Issue
8
fYear
1983
fDate
8/1/1983 12:00:00 AM
Firstpage
275
Lastpage
277
Abstract
We report the use of an As2 (instead of As4 ) beam during molecular beam epitaxial (MBE) growth of Gax Aly In1-x-y As layers, lattice-matched to InP substrate. We also show that use of the As2 beam improves the room-temperature photoluminescence intensities of both In0.53 Ga0.47 As and Ga0.39 Al0.08 In0.53 As epilayers with more significant improvement for the latter. The substrate temperature employed was ∼ 580°C for both.
Keywords
Artificial intelligence; Avalanche photodiodes; Gallium arsenide; Indium phosphide; Molecular beam applications; Molecular beam epitaxial growth; Molecular beams; Photoluminescence; Substrates; Temperature;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1983.25731
Filename
1483475
Link To Document