Title :
`Smart integrated circuit processing
Author :
Fu, Chi-Yung ; Chang, Norman H. ; Lin, Kuang-Kuo
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
fDate :
11/1/1989 12:00:00 AM
Abstract :
The authors describe the Berkeley intelligent processing system (BIPS), part of an effort to integrate expert system technology into IC manufacturing. The current effort of BIPS is to automate the furnace and low-pressure chemical vapor deposition (LPCVD) processing fully. Four different modules that compose BIPS (the process recipe generation module, the editor, compiler, and translator module, the monitor and diagnostic module, and the communication module) have been developed, and the results obtained using each module are discussed. Process results predicted by BIPS are in reasonable agreement with experimental results
Keywords :
electronic engineering computing; expert systems; integrated circuit manufacture; manufacturing computer control; manufacturing data processing; production control; Berkeley intelligent processing system; CVD processing automation; IC manufacturing; chemical vapor deposition; communication module; compiler; diagnostic module; editor; expert system technology; furnace automation; low pressure CVD; monitor; process recipe generation module; translator module; Application software; Chemical technology; Computer aided manufacturing; Design automation; Diagnostic expert systems; Expert systems; Furnaces; Manufacturing automation; Manufacturing processes; Monitoring;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
