DocumentCode :
1091109
Title :
IEEE copyright form
Volume :
20
Issue :
1
fYear :
2007
Firstpage :
55
Lastpage :
56
Abstract :
Authors must enclose a signed copy of this form when submitting manuscripts to the Editor of this publication.
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2007.892049
Filename :
4089015
Link To Document :
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