Dynamic Modeling of Soft Magnetic Film Actuated Scanners

Dynamic behavior of magnetic thin film actuators is investigated in detail and applied to various laser scanning applications. Magnetic hysteresis effects are incorporated into the model developed in the prior work, which assumes linear magnetization as a function of magnetic field and is based on the distributed point-by-point calculation of the magnetostatic moments and forces across the film surface. A simple functional form is used to model the major B-H loop of ferromagnetic films. The model is validated with permalloy (Ni-Fe) plated polymer actuators. The actuators are excited using an external electro-coil and the structures deflect due to magnetic anisotropy torque. The ac deflection of the actuators is modeled by calculating the point-by-point moments on the magnetic film and the solution can handle nonuniform external field and unsaturated magnetic film cases. A 25deg optical scan angle is demonstrated for laser scanning display and imaging applications with a nonoptimum coil. Scaling the model to MEMS devices is also discussed.