• DocumentCode
    1091283
  • Title

    A novel deposit/spin waveguide interconnection (DSWI) for semiconductor integrated optics

  • Author

    Furuya, Kazuhito ; Miller, Barry I. ; Coldren, Larry A. ; Howard, Richard E.

  • Author_Institution
    Tokyo Institute of Technology, Tokyo, Japan
  • Volume
    18
  • Issue
    10
  • fYear
    1982
  • fDate
    10/1/1982 12:00:00 AM
  • Firstpage
    1783
  • Lastpage
    1789
  • Abstract
    We propose an efficient and simple optical interconnection between active semiconductor components by deposition and spin coating. Details of the waveguide design, the fabrication technique, and a promising material combination are given. Experimental results with an integrated laser-polyimide/SiOx( x \\sim 2 ) waveguide combination demonstrate low-threshold (2.0 kA/cm2) laser operation and a low-loss waveguide interconnection (81 percent coupling efficiency) on a GaInAsP/InP chip.
  • Keywords
    Coatings; Integrated circuit interconnections; Interconnections, Integrated circuits; Optical strip waveguides; Coatings; Integrated optics; Optical device fabrication; Optical interconnections; Optical materials; Optical waveguides; Semiconductor lasers; Semiconductor materials; Semiconductor waveguides; Waveguide lasers;
  • fLanguage
    English
  • Journal_Title
    Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9197
  • Type

    jour

  • DOI
    10.1109/JQE.1982.1071396
  • Filename
    1071396
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1091283