Title :
Etched mirror and groove-coupled GaInAsP/InP laser devices for integrated optics
Author :
Coldren, Larry A. ; Furuya, Kazuhito ; Miller, Barry I. ; Rentschler, John A.
Author_Institution :
University of California, Santa Barbara, CA
fDate :
10/1/1982 12:00:00 AM
Abstract :
Recent advances in wet and dry etching techniques for GaInAsP/InP laser structures allow the reproducible fabrication of planar and vertical walled facets and grooves. These elements provide efficient mirrors and interstage couplers that may provide the basis for a new generation of monolithic integrated optical devices. Initial experimental results on etched facet lasers and groove-coupled two-section lasers verify theoretical expectations.
Keywords :
Gallium materials/lasers; Integrated optics; Laser couplers; Laser resonators; Chemical lasers; Dry etching; Indium phosphide; Integrated optics; Laser theory; Mirrors; Optical coupling; Optical devices; Reproducibility of results; Wet etching;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1982.1071404
