Title :
Measurement of diffusion length, lifetime, and surface recombination velocity in thin semiconductor layers
Author :
Gonzalez, Franklin N. ; Neugroschel, Arnost
Author_Institution :
Harris Corporation, Melbourne, FL
fDate :
4/1/1984 12:00:00 AM
Abstract :
A small-signal admittance method is developed for the determination of two important parameters affecting the performance of several semiconductor devices with thin layers such as I2L and MOS transistors, OCI-HLE, BSF and TJ solar cells. These parameters, the minority-carrier diffusion length (or the minority-carrier lifetime) and the surface recombination velocity, are found using a combination of low-frequency and high-frequency admittance measurements. The theoretical base of the method and experimental results showing its application and usefulness are presented.
Keywords :
Admittance measurement; Current measurement; Length measurement; MOSFETs; Photovoltaic cells; Radiative recombination; Semiconductor devices; Substrates; Velocity measurement; Yield estimation;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1984.21542