Title :
Architecture and overview of MMST machine control [semiconductor manufacturing facilities]
Author :
Beaver, Richard ; Coleman, Andy ; Draheim, Dennis ; Hoffman, Andy
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
fDate :
5/1/1994 12:00:00 AM
Abstract :
This article describes the configurable MMST (Microelectronics Manufacturing Science and Technology) machine control architecture. The architecture has been developed to allow for quick insertion into current fabrication facilities while also allowing for a complete bottoms-up implementation of the machine control software. The MMST machine control is specifically designed to work with the next generation of vacuum-processing cluster tools currently under development by semiconductor equipment vendors and provides a windows based, graphical control panel for the equipment user
Keywords :
computer integrated manufacturing; integrated circuit manufacture; semiconductor device manufacture; MMST machine control; configurable architecture; fabrication facilities; semiconductor processing equipment; vacuum-processing cluster tools; windows based graphical control panel; Computer architecture; Computer integrated manufacturing; Costs; Fabrication; Machine control; Microelectronics; Process control; Production facilities; Remote monitoring; Topology;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
