DocumentCode :
1092777
Title :
Novel optical distance sensor based on MSM technology
Author :
Gulden, Peter G. ; Becker, Dirk ; Vossiek, Martin
Author_Institution :
Corporate Technol. Dept., Siemens Corporate Technol., Munich, Germany
Volume :
4
Issue :
5
fYear :
2004
Firstpage :
612
Lastpage :
618
Abstract :
This paper describes a novel distance-sensor concept based on photodiodes in metal-semiconductor-metal technology (MSM). MSM photodiodes can be operated as electrooptical mixers functioning similar to the so-called photonic mixing device (PMD). This paper employs the correlation techniques previously used with the PMD to the MSM. First, experimental results obtained with the MSM inserted into the authors´ standard laboratory setup are provided. Additionally, different configurations well suited for mixer operation of the MSM are pointed out. Throughout this paper, similarities between the PMD and MSM are pointed out, as well as key differences.
Keywords :
correlation methods; distance measurement; electro-optical devices; metal-semiconductor-metal structures; optical sensors; photodiodes; correlation techniques; electrooptical mixers; metal-semiconductor-metal technology; optical distance sensor; optical intensity modulation; photodiodes; photonic mixing device; time-of-flight distance measurement; Amplitude modulation; Distance measurement; Light sources; Optical mixing; Optical modulation; Optical sensors; Optoelectronic and photonic sensors; Paper technology; Photodiodes; Sensor phenomena and characterization; Electrooptical mixer; IM; MSM; PMD; TOF; distance measurement; metal–semiconductor–metal technology; optical intensity-modulation; photonic mixing device; time-of-flight;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2004.833151
Filename :
1331369
Link To Document :
بازگشت