Title :
A new open diffusion technique using evaporated Zn3P2and its application to a lateral p-n-p transistor
Author :
Schmitt, Felix ; Man Su, Li ; Franke, Dieter ; Kaumanns, R. ; Kaumanns, Roland
Author_Institution :
Heinrich-Hertz-Institut für Nachrichtentechnik Berlin, Germany
fDate :
8/1/1984 12:00:00 AM
Abstract :
This paper reports a new open diffusion technique with a thin vacuum-deposited Zn3P2layer covered by an Al2O3layer. The diffusion in
Keywords :
Crystals; Degradation; Diffusion processes; Etching; Indium phosphide; Optical devices; P-n junctions; Temperature; Vacuum technology; Zinc;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1984.21665
