• DocumentCode
    1095393
  • Title

    Investigation of on-chip high temperature annealing of PMOS dosimeters

  • Author

    Kelleher, Annmarie ; Lane, William ; Adams, Leonard

  • Author_Institution
    Nat. Microelectron. Res. Centre, Univ. Coll. Cork, Ireland
  • Volume
    43
  • Issue
    3
  • fYear
    1996
  • fDate
    6/1/1996 12:00:00 AM
  • Firstpage
    997
  • Lastpage
    1001
  • Abstract
    Radiation sensitive pMOS dosimeters can measure only to a maximum dose which is determined by the type, sensitivity and irradiation conditions of the RADFET. On reaching the maximum dose, the dosimeters normally have to be replaced. The aim of this work is to study the feasibility of using on-chip poly-resistor heaters to anneal the dosimeters back to their pre-irradiation threshold voltage. This study shows that on-chip heating is a viable option to achieve post-irradiation annealing, and that the fading characteristics obtained agree with those of oven annealing from a previous study which was carried out on the NMRC RADFETs
  • Keywords
    MOSFET; annealing; dosimeters; semiconductor counters; PMOS dosimeters; RADFETs; fading; on-chip high temperature annealing; poly-resistor heaters; radiation sensitivity; threshold voltage; Annealing; Back; Microelectronics; Ovens; Plasma temperature; Resistors; Space heating; Space vehicles; Temperature sensors; Threshold voltage;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/23.510746
  • Filename
    510746