DocumentCode
1095393
Title
Investigation of on-chip high temperature annealing of PMOS dosimeters
Author
Kelleher, Annmarie ; Lane, William ; Adams, Leonard
Author_Institution
Nat. Microelectron. Res. Centre, Univ. Coll. Cork, Ireland
Volume
43
Issue
3
fYear
1996
fDate
6/1/1996 12:00:00 AM
Firstpage
997
Lastpage
1001
Abstract
Radiation sensitive pMOS dosimeters can measure only to a maximum dose which is determined by the type, sensitivity and irradiation conditions of the RADFET. On reaching the maximum dose, the dosimeters normally have to be replaced. The aim of this work is to study the feasibility of using on-chip poly-resistor heaters to anneal the dosimeters back to their pre-irradiation threshold voltage. This study shows that on-chip heating is a viable option to achieve post-irradiation annealing, and that the fading characteristics obtained agree with those of oven annealing from a previous study which was carried out on the NMRC RADFETs
Keywords
MOSFET; annealing; dosimeters; semiconductor counters; PMOS dosimeters; RADFETs; fading; on-chip high temperature annealing; poly-resistor heaters; radiation sensitivity; threshold voltage; Annealing; Back; Microelectronics; Ovens; Plasma temperature; Resistors; Space heating; Space vehicles; Temperature sensors; Threshold voltage;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/23.510746
Filename
510746
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